CAJ | 학술논문

铜铌溅射型低β超导腔的研制及初步实验
동니천사형저β초도강적연제급초보실험
Researches and Preliminary Experiments on Copper-Niobium Sputtered Low-β Superconducting Resonator

万方数据

高能物理与核物理高能物理與覈物理 고능물리여핵물리
HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS
2001年 6期 582-587 ,共6页

郝建奎%赵夔%张保澄%谢大林%王莉芳%全胜文%沈子林%唐渝兴%张云驰%杨希%胡岩乐%赵坤

학건규%조기%장보징%사대림%왕리방%전성문%침자림%당투흥%장운치%양희%호암악%조곤

薄膜超导腔铜铌溅射%QWR%低温实验薄膜超導腔銅鈮濺射%QWR%低溫實驗
박막초도강동니천사%QWR%저온실험

超导谐振腔是超导加速器的关键部件. 用于重离子超导加速器的低β加速腔的最佳选择是四分之一波长谐振腔(QWR). 目前，利用无氧铜为基底，溅射一层几微米厚的铌膜，可以获得极好的超导性能和加速离子性能. 但是，四分之一波长谐振腔的内表面复杂，溅射均匀的铌膜比较困难. 针对此难题，发展了一种多参数可调节的溅射方法，在640×220的大型腔体内，成功地生成了一层均匀的、超导性能优异的铌膜. 超导腔的低温实验表明铌膜的性能良好.
초도해진강시초도가속기적관건부건. 용우중리자초도가속기적저β가속강적최가선택시사분지일파장해진강(QWR). 목전，이용무양동위기저，천사일층궤미미후적니막，가이획득겁호적초도성능화가속리자성능. 단시，사분지일파장해진강적내표면복잡，천사균균적니막비교곤난. 침대차난제，발전료일충다삼수가조절적천사방법，재640×220적대형강체내，성공지생성료일층균균적、초도성능우이적니막. 초도강적저온실험표명니막적성능량호.
Superconducting resonator is the important component of a superconducting accelerator. The best choice of the acceleration cavity for heavy ion superconducting accelerator is quarter wave resonator (QWR). By sputtering a layer of niobium films of several microns on the OFHC copper substrate, good superconducting properties and acceleration properties of the cavity can be obtained. However, it is very difficult to get uniform niobium films by sputtering because the inner surface of the QWR is complicated. To deal with this problem, we developed a multiparameter adjusting method to control the sputtering process of different parts of the QWR. A layer of uniform niobium film with nice superconducting performance is obtained. The low temperature experiments with liquid helium show that the Cu-Nb QWR has good superconducting characters. The Q-value of the cavity is about 5×108.