CAJ | 학술논문

表面微机械加工技术是实现单片集成微光学系统的一种新方法。本文介绍一种新型的采用微机械加工技术的微型光学加速度计，包括设计、关键器件的加工和测试，它是基于光线和光闸相互作用引起通光量变化的工作原理。这一微光学加速度计包含一个2μm厚的多晶硅光闸，光闸采用微弹簧支撑在基片上，微弹簧是长度为200μm的多晶硅褶曲梁，硅基片和微结构之间所夹的牺牲层采用氢氟酸湿法刻蚀去除。光闸设计为一个质量弹簧系统，对加速度力产生响应。
표면미궤계가공기술시실현단편집성미광학계통적일충신방법。본문개소일충신형적채용미궤계가공기술적미형광학가속도계，포괄설계、관건기건적가공화측시，타시기우광선화광갑상호작용인기통광량변화적공작원리。저일미광학가속도계포함일개2μm후적다정규광갑，광갑채용미탄황지탱재기편상，미탄황시장도위200μm적다정규습곡량，규기편화미결구지간소협적희생층채용경불산습법각식거제。광갑설계위일개질량탄황계통，대가속도력산생향응。
Surface micromachining fabrication process offers a novelapproach for realizing micro-optical system onto a chip. A new Micromachined Micro Optical Accelerometer (MMOA) which relies on the amount change of light flux due to the interaction between a light beam and an optical shutter has been designed, and its key device has been fabricated and tested. The MMOA consists of a 2 μm thick polysilicon shutter suspended on the substrate by springs which are 200 μm long polysilicon folded beams. The sacrificial layer sandwiched between the silicon substrate and the structure is removed with hydrofluoric acid wet etching. The shutter is designed as a mass-spring system that moves in response to acceleration force.