CAJ | 학술논문

本文自主研发设计了一套基于纳秒脉冲激光的加工系统,包括了控制单元、上位机图形软件、机械结构和光路系统.利用此系统,在单晶硅表面进行了微结构图形的加工实验,得到了较好的加工效果.借助卤素灯照明的显微镜和荧光显微镜对结果进行了进一步的观察分析,发现利用荧光显微镜进行观察,加工后的区域在特定波长照明光的照射下激发出荧光,可以清楚的看到加工结构的内部信息,边缘特征.说明纳秒脉冲激光可以改变硅材料表面的光学属性,这对进一步研究激光和硅材料的相互作用打下了一定的基础.
본문자주연발설계료일투기우납초맥충격광적가공계통,포괄료공제단원、상위궤도형연건、궤계결구화광로계통.이용차계통,재단정규표면진행료미결구도형적가공실험,득도료교호적가공효과.차조서소등조명적현미경화형광현미경대결과진행료진일보적관찰분석,발현이용형광현미경진행관찰,가공후적구역재특정파장조명광적조사하격발출형광,가이청초적간도가공결구적내부신식,변연특정.설명납초맥충격광가이개변규재료표면적광학속성,저대진일보연구격광화규재료적상호작용타하료일정적기출.
A digital multifunctional laser machining system, including control system, software of computer, mechanical structure and optical system, is designed. With the system, some microstructures have been processed in the single crystal silicon and system realizes good result. With microscopy illuminated by Halogen Light and fluorescence microscopy, results are further observed and analyzed. The ablated region illuminated by specific wavelength light has luminescence property. It is clear to see the internal processing structure information and edge characteristics. Nanosecond pulse laser can change material property of silicon,which help us to study the process of laser silicon interaction.