CAJ | 학술논문

为了增加天线带宽,提高天线机械稳定性,改善天线性能,提出并设计制作了一种工作在35 GHz的硅基MEMS渐变式缝隙天线.针对渐变式缝隙天线在毫米波频段介电常数高、衬底极薄、易碎、不易制作等问题,利用ICP深刻蚀工艺在衬底上形成了周期性通孔阵列,从而减小了衬底有效介电常数,增加了衬底厚度,同时利用共面波导-槽线对该天线进行馈电.仿真结果表明,该天线带宽为28.2%,增益为8.7 dB.采用微机械工艺对该天线进行加工,测得其带宽为13.2%.与传统天线相比,该天线进一步提高了天线衬底的机械稳定性,增加了天线带宽,且易于集成.
위료증가천선대관,제고천선궤계은정성,개선천선성능,제출병설계제작료일충공작재35 GHz적규기MEMS점변식봉극천선.침대점변식봉극천선재호미파빈단개전상수고、츤저겁박、역쇄、불역제작등문제,이용ICP심각식공예재츤저상형성료주기성통공진렬,종이감소료츤저유효개전상수,증가료츤저후도,동시이용공면파도-조선대해천선진행궤전.방진결과표명,해천선대관위28.2%,증익위8.7 dB.채용미궤계공예대해천선진행가공,측득기대관위13.2%.여전통천선상비,해천선진일보제고료천선츤저적궤계은정성,증가료천선대관,차역우집성.
A Tapered Slot Antenna (TSA) fed by a Coplanar Waveguide(CPW) on a high dielectric constant substrate (εr=11.9) worked at 35 Ghz is presented. The performance of the TSA is sensitive to the effective thickness and electric constant of the substrate. In consideration of thin and fragile features of the high dielectric constant substrate for millimeter-wave application, a series of very closely spaced holes are formed on the substrate by using a deep etch technology, which synthesizes a localized low dielectric-constant environment and increases the effective thickness of the substrate. Other wise, CPW-to-SLOT transitions with low insertion losses are proposed to feed this antenna. The simulation results show that the bandwidth and the gain of the antenna have been achieved 28.2% and8.7 dB,respectively. After using micromachining technologies, the measured result shows the bandwidth is 13.2%. The difference between simulation and measurement is mainly attributed to the improvement for fabrication errors and measurement loads. This CPW-fed TSA has been expected to apply to communication systems for its easy integration with the uniplanar monolithic millimeter-wave integrated circuits.