电子工业专用设备
電子工業專用設備
전자공업전용설비
EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
2012年
2期
15-18
,共4页
多线切割%悬浮液%黏度
多線切割%懸浮液%黏度
다선절할%현부액%점도
Multi-wire slicing%Suspension solution%Viscosity
多线切割在光伏以及半导体行业中有着广泛的应用,多线切割所用的悬浮液有着非常重要的作用,性能优良的悬浮液兼有切削、粘滞、冷却三大功能,可以有效提高硅片质量,提高生产效率。研究其特性主要是温度对其的影响,说明在科研生产中,悬浮液要控制在适宜的温度范围内,才能有效控制晶片质量。
多線切割在光伏以及半導體行業中有著廣汎的應用,多線切割所用的懸浮液有著非常重要的作用,性能優良的懸浮液兼有切削、粘滯、冷卻三大功能,可以有效提高硅片質量,提高生產效率。研究其特性主要是溫度對其的影響,說明在科研生產中,懸浮液要控製在適宜的溫度範圍內,纔能有效控製晶片質量。
다선절할재광복이급반도체행업중유착엄범적응용,다선절할소용적현부액유착비상중요적작용,성능우량적현부액겸유절삭、점체、냉각삼대공능,가이유효제고규편질량,제고생산효솔。연구기특성주요시온도대기적영향,설명재과연생산중,현부액요공제재괄의적온도범위내,재능유효공제정편질량。
The multi-wire slicing process had widely been used in the semiconductor industry,the suspension solution for the multi-wire slicing process had greatly important affection on the multi-wire slicing process.The good suspension solution,which had very remarkable performance in slicing,adhering,cooling,could improve the wafer quality and the productivity yield.The article was addressed on the effect on the temperature on the suspension solution,the suitable temperature range was concluded to control the wafer quality in the multi-wire slicing process.
