半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2007年
z1期
58-61
,共4页
罗卫军%陈晓娟%刘果果%刘新宇%王晓燕%方测宝%郭伦春%王晓亮
囉衛軍%陳曉娟%劉果果%劉新宇%王曉燕%方測寶%郭倫春%王曉亮
라위군%진효연%류과과%류신우%왕효연%방측보%곽륜춘%왕효량
滤波器%扇形线%测试电路%阶梯阻抗%叉指耦合电容
濾波器%扇形線%測試電路%階梯阻抗%扠指耦閤電容
려파기%선형선%측시전로%계제조항%차지우합전용
filteri radial stub%test circuit%stepped-impedance%interdigital couple capacitor
在微波电路原理和半导体器件物理的基础上,设计和模拟了三种用于微波功率器件的测试电路,并且设计了与之配套的测试夹具.采用矢量网络分析仪对该测试电路和夹具,在3~8GHz范围内进行了小信号测试.模拟和测试结果表明,采用阶梯阻抗滤波器偏置网络的测试电路性能较好,比采用扇形线偏置网络的测试电路具有更宽的带宽.该滤波器偏置电路能够用来在整个C波段,即在4~8GHz内对微波功率器件进行测试.但是,微带叉指耦合电容没有起到取代贴片隔直电容的目的,原因是该结构对参数精度要求高,而PCB制作工艺无法满足这个要求.
在微波電路原理和半導體器件物理的基礎上,設計和模擬瞭三種用于微波功率器件的測試電路,併且設計瞭與之配套的測試夾具.採用矢量網絡分析儀對該測試電路和夾具,在3~8GHz範圍內進行瞭小信號測試.模擬和測試結果錶明,採用階梯阻抗濾波器偏置網絡的測試電路性能較好,比採用扇形線偏置網絡的測試電路具有更寬的帶寬.該濾波器偏置電路能夠用來在整箇C波段,即在4~8GHz內對微波功率器件進行測試.但是,微帶扠指耦閤電容沒有起到取代貼片隔直電容的目的,原因是該結構對參數精度要求高,而PCB製作工藝無法滿足這箇要求.
재미파전로원리화반도체기건물리적기출상,설계화모의료삼충용우미파공솔기건적측시전로,병차설계료여지배투적측시협구.채용시량망락분석의대해측시전로화협구,재3~8GHz범위내진행료소신호측시.모의화측시결과표명,채용계제조항려파기편치망락적측시전로성능교호,비채용선형선편치망락적측시전로구유경관적대관.해려파기편치전로능구용래재정개C파단,즉재4~8GHz내대미파공솔기건진행측시.단시,미대차지우합전용몰유기도취대첩편격직전용적목적,원인시해결구대삼수정도요구고,이PCB제작공예무법만족저개요구.
With the principles of microwave circuits and semiconductor device physics, three kinds of microwave power device test circuits are designed and simulated, whose properties are evaluated by a parameter network analyzer within the frequency range from 3 to 8GHz. The simulated results verify that the test circuit with stepped-impedance filter bias network has a larger bandwidth than that with the radial stub. A microstrip interdigital capacitor is used in the third test circuit to replace the DC block,however,which does not show its advantage during the test frequency band. Based on the simulated results, the stepped-impedance filter test circuit can be used to evaluate microwave power devices in the whole C band,namely from 4 to 8GHz.