CAJ | 학술논문

从宏观粒子和微观粒子的输运现象及等离子体化学入手，建立了宏观粒子沉降过程中的纯化模型.计算了各类粒子的浓度的径向分布、加速度、速度、沉降时间及杂质的去除总量.结果表明，对于纯度为99?％的Si-Ge合金颗粒中的杂质总量可去除97?％左右.计算结果与实验结果接近.
종굉관입자화미관입자적수운현상급등리자체화학입수，건립료굉관입자침강과정중적순화모형.계산료각류입자적농도적경향분포、가속도、속도、침강시간급잡질적거제총량.결과표명，대우순도위99?％적Si-Ge합금과립중적잡질총량가거제97?％좌우.계산결과여실험결과접근.
The purification model of macroscopic particles in descending process is established from the transport phenomena of particles and plasma chemicals. The concentration distribution, acceleration, velocity, and descending time of all kinds of particles and the removing amount of the impurities are calculated. Being identical with the experimental effects, the results show that about 97?% of impurities in silicon-germanium alloy powder can be removed.