CAJ | 학술논문

设计和分析了一种基于SOI（绝缘体上的硅）脊型波导非对称马赫曾德尔结构的集成矢量和微波光子移相器。对于10 GHz的微波信号,设定非对称两臂的长度差为3 983μm时,其相应的时间延迟约为47 ps。分别在两臂上集成了一个热光可调谐可变光衰减器用于光学调谐,当衰减单元的折射率在0～6×10-3变化时,实现了10 GHz微波信号在0～180°的相位调谐。该器件尺寸小、结构紧凑,易于实现片上集成,在光控相控阵雷达中很有应用前景。
설계화분석료일충기우SOI（절연체상적규）척형파도비대칭마혁증덕이결구적집성시량화미파광자이상기。대우10 GHz적미파신호,설정비대칭량비적장도차위3 983μm시,기상응적시간연지약위47 ps。분별재량비상집성료일개열광가조해가변광쇠감기용우광학조해,당쇠감단원적절사솔재0～6×10-3변화시,실현료10 GHz미파신호재0～180°적상위조해。해기건척촌소、결구긴주,역우실현편상집성,재광공상공진뢰체중흔유응용전경。
An integrated vector sum microwave photonic phase shifter（MWPPS） based on the asymmetric Mach-Zendner structure in Silicon on Insulator（SOI） rib waveguides was designed and fabricated for the first time.A fixed true time delay of 47 ps was achieved by a length difference of 3 983 μm between the two asymmetric arms.Then two thermo-optical Variable Optical Attenuators（VOAs） were integrated in the two arms respectively to tune the optical power individually.The phase shift ranging from 0° to near 180° for a 10 GHz microwave signal has been achieved by the RI variation of 06×10-3 in VOAs.The device which has a very compact size could be easily integrated in silicon optoelectronic chips and expected to be widely used in Optically Controlled Phased Array Radars（OCPARs）.