CAJ | 학술논문

在室温条件下利用射频等离子增强化学气相沉积技术在Si衬底和玻璃沉底上制备了类金刚石薄膜。通过对Si衬底生长的DLC薄膜的反射光谱分析发现DLC薄膜具有一定的减反射效果。玻璃衬底上制备的DLC薄膜的透射光谱分析表明制备的DLC薄膜在可见光区具有一定的增透作用。理论分析认为DLC薄膜透光性能主要与薄膜的sp3键的百分含量有关,当sp3键含量高时,光学透过性好,当sp3键含量低时,光学透过性差。DLC薄膜在He-Cd脉冲光激发下PL谱分析发现DLC薄膜的发光峰为460 nm,在该条件下制备的DLC薄膜光学带宽是2.7eV,认为DLC薄膜发光主要是通过sp2原子团簇中电子空穴对的辐射复合而完成。
재실온조건하이용사빈등리자증강화학기상침적기술재Si츤저화파리침저상제비료류금강석박막。통과대Si츤저생장적DLC박막적반사광보분석발현DLC박막구유일정적감반사효과。파리츤저상제비적DLC박막적투사광보분석표명제비적DLC박막재가견광구구유일정적증투작용。이론분석인위DLC박막투광성능주요여박막적sp3건적백분함량유관,당sp3건함량고시,광학투과성호,당sp3건함량저시,광학투과성차。DLC박막재He-Cd맥충광격발하PL보분석발현DLC박막적발광봉위460 nm,재해조건하제비적DLC박막광학대관시2.7eV,인위DLC박막발광주요시통과sp2원자단족중전자공혈대적복사복합이완성。
In this paper,the films were successfully prepared on Si and glass substrates by radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） under the condition of room temperature.It is noted that the reflection spectrum of DLC films prepared on Si substrate has the property of protective reflective layer.Obviously,the transmission spectrum of DLC films shows that DLC films have certainly increased transmission within the visible area.It was found that the transmission of the DLC films was primarily related to percentage of sp3 bonds.In the case of the proportion of sp3 bonds,when it was high the optical transmission was excellent,otherwise,the optical transmission was poor.It was also found that the illumination peak of DLC films from the PL spectrum locates at 460nm with the DLC films analysis by the He-Cd pulse photoexcitation.As a result,the DLC thin-films band gap was calculated to be as 2.7eV.It is theoretically noted that the light-emitting of DLC films results mainly from the radiative recombination of electron-hole pair of the sp2 clusters.Meanwhile,the experimental study indicated that the DLC films have few sp2 bonds.