CAJ | 학술논문

为了改善硅微机械扭转微镜的机电耦合特性,降低器件的驱动电压并提高其工作可靠性,提出了几种新颖的基于复合静电驱动结构的硅微机械扭转微镜.提出的硅微机械扭转微镜将垂直扭转梳齿静电驱动结构、侧壁平行板电容静电驱动结构有机结合,实现了两种静电驱动方式的复合驱动,同时设计了内外双镜面结构,通过内外双镜面结构,实现了微镜的差动复合驱动,理论分析、模拟仿真与测试结果表明,通过上述两个方面新颖的设计,新结构显著降低了器件的驱动电压.同时为了提高器件的工作可靠性,在设计折叠梁柔性支撑结构时,将梁的不同位置设计成不同的厚度,对于硅微机械扭转微镜扭转过程中容易疲劳的梁部分加大了其厚度,从而在不影响器件扭转性能的前提下,明显提高了器件的可靠性.利用有限元方法对器件的力学特性和机电耦合特性进行了系统的仿真,获得了影响器件机电特性的关键结构参数.器件基于SOI晶片,采用表面硅工艺与体硅工艺相结合的方式加工制造,采用SOI晶片显著降低了微镜镜面的表面粗糙度,提高了其光反射能力.最后利用原子力显微镜对微镜镜面的表面粗糙度进行了测量和分析,实验结果表面微镜表面具有16nm的表面粗糙度,完全可以满足光学应用的需要.
위료개선규미궤계뉴전미경적궤전우합특성,강저기건적구동전압병제고기공작가고성,제출료궤충신영적기우복합정전구동결구적규미궤계뉴전미경.제출적규미궤계뉴전미경장수직뉴전소치정전구동결구、측벽평행판전용정전구동결구유궤결합,실현료량충정전구동방식적복합구동,동시설계료내외쌍경면결구,통과내외쌍경면결구,실현료미경적차동복합구동,이론분석、모의방진여측시결과표명,통과상술량개방면신영적설계,신결구현저강저료기건적구동전압.동시위료제고기건적공작가고성,재설계절첩량유성지탱결구시,장량적불동위치설계성불동적후도,대우규미궤계뉴전미경뉴전과정중용역피로적량부분가대료기후도,종이재불영향기건뉴전성능적전제하,명현제고료기건적가고성.이용유한원방법대기건적역학특성화궤전우합특성진행료계통적방진,획득료영향기건궤전특성적관건결구삼수.기건기우SOI정편,채용표면규공예여체규공예상결합적방식가공제조,채용SOI정편현저강저료미경경면적표면조조도,제고료기광반사능력.최후이용원자력현미경대미경경면적표면조조도진행료측량화분석,실험결과표면미경표면구유16nm적표면조조도,완전가이만족광학응용적수요.
Some new kinds of torsion micromirrors with advanced compound driving structures as well as novel folding torsion-spring structures are proposed and fabricated in SOI wafers by combing with bulk micro machining and surface micro machining technology to improve the electromechanical performances and the optical properties of torsion micromirrors. To evaluate the mechanical robustness and the electrical response, the electromechanical performances of the components are investigated experimentally and theoretically. At the same time the surface roughness of the micromirrors is measured and analyzed to characterize the optical properties of the micromirrors. And then some parameters which greatly affect the mirror's total performance are obtained.The theoretical and experimental studies manifest that the compound driving structures and folding torsion-spring structures are much benefit to decreasing the yielding voltages of actuating the micromirrors and, thus, making their tilting motion easier.