新疆大学学报（自然科学版）
新疆大學學報（自然科學版）
신강대학학보（자연과학판）
XINJIANG UNIVERSITY JOURNAL(NATURAL SCIENCE EDITION)
2007年
2期
134-138,143
,共6页
多孔硅%波导%棱镜%耦合光栅
多孔硅%波導%稜鏡%耦閤光柵
다공규%파도%릉경%우합광책
porous silicon%waveguide%prism%grating coupler
报道了用电化学腐蚀法结合激光干涉或聚合物掩膜制备多孔硅通道波导、定向耦合器、波导棱镜、光栅耦合器和激光诱导动态光栅等光子器件,并给出了这些多孔硅光波导器件的性能参数,研究结果表明可利用多孔硅开发出新的全硅光电子器件.
報道瞭用電化學腐蝕法結閤激光榦涉或聚閤物掩膜製備多孔硅通道波導、定嚮耦閤器、波導稜鏡、光柵耦閤器和激光誘導動態光柵等光子器件,併給齣瞭這些多孔硅光波導器件的性能參數,研究結果錶明可利用多孔硅開髮齣新的全硅光電子器件.
보도료용전화학부식법결합격광간섭혹취합물엄막제비다공규통도파도、정향우합기、파도릉경、광책우합기화격광유도동태광책등광자기건,병급출료저사다공규광파도기건적성능삼수,연구결과표명가이용다공규개발출신적전규광전자기건.
Porous silicon buried channel optical waveguides,waveguide directional coupler,waveguides prism,grating coupler and laser-induced dynamic grating fabricated by electrochemical anodisation method assisted by laser beams interference or polymer masking have been reported in this paper.The properties of these optical waveguide devices bave been analyzed.The experimental results show that porous silicon can be used to develop new all-silicon optoelectronic integrated devices.
