红外与毫米波学报
紅外與毫米波學報
홍외여호미파학보
JOURNAL OF INFRARED AND MILLIMETER WAVES
2009年
4期
249-253
,共5页
高杰%张青川%陈大鹏%焦斌斌%史海涛%钱剑%程腾%伍小平
高傑%張青川%陳大鵬%焦斌斌%史海濤%錢劍%程騰%伍小平
고걸%장청천%진대붕%초빈빈%사해도%전검%정등%오소평
非制冷红外成像%双材料微悬臂梁%光学读出%焦平面阵列
非製冷紅外成像%雙材料微懸臂樑%光學讀齣%焦平麵陣列
비제랭홍외성상%쌍재료미현비량%광학독출%초평면진렬
uncooled infrared imaging%bi-microcantilever%optical readout%FPA
在刀口滤波光学读出方法的基础上,讨论了反光板弯曲的情况下,刀口滤波方法的光学检测灵敏度与反光板长度之间的关系.分析表明,在反光板曲率半径一定的情况下,光学检测灵敏度首先随着反光板长度的增加而增大,达到最大值后随着反光板长度的增加而减小.对于不同曲率半径和长度的反光板,分析给出反光板长度L和曲率半径R在满足L~2/R=λ(λ为照明光波长)时,光学检测灵敏度达到最大值.实验测量了已制作的像素尺寸分别为200μm,120μm和60μmFPA的光学检测灵敏度,其实验结果和理论分析一致.
在刀口濾波光學讀齣方法的基礎上,討論瞭反光闆彎麯的情況下,刀口濾波方法的光學檢測靈敏度與反光闆長度之間的關繫.分析錶明,在反光闆麯率半徑一定的情況下,光學檢測靈敏度首先隨著反光闆長度的增加而增大,達到最大值後隨著反光闆長度的增加而減小.對于不同麯率半徑和長度的反光闆,分析給齣反光闆長度L和麯率半徑R在滿足L~2/R=λ(λ為照明光波長)時,光學檢測靈敏度達到最大值.實驗測量瞭已製作的像素呎吋分彆為200μm,120μm和60μmFPA的光學檢測靈敏度,其實驗結果和理論分析一緻.
재도구려파광학독출방법적기출상,토론료반광판만곡적정황하,도구려파방법적광학검측령민도여반광판장도지간적관계.분석표명,재반광판곡솔반경일정적정황하,광학검측령민도수선수착반광판장도적증가이증대,체도최대치후수착반광판장도적증가이감소.대우불동곡솔반경화장도적반광판,분석급출반광판장도L화곡솔반경R재만족L~2/R=λ(λ위조명광파장)시,광학검측령민도체도최대치.실험측량료이제작적상소척촌분별위200μm,120μm화60μmFPA적광학검측령민도,기실험결과화이론분석일치.
Based on the optical readout method with knife edge filter, the relationship between the optical detection sensitivity and reflector length was discussed under the circumstance that the reflector was bent.Analysis indicates that the optical sensitivity increases with the reflector's lengthening at first, then it reaches a maximum value, and then it decreases as the reflector continues to lengthen.For the reflectors with different curvature radii and lengths, analysis shows that the sensitivity will reach a maximum value when the expression L~2/R = λ(L is length of reflector, R is curvature of the reflector, A is wavelength of illumination light) is satisfied.The optical detection sensitivities of the fabricated FPAs with different pixel sizes as 200μm, 120μm and 60μm were obtained experimentally.The result coincides with the theoretical analysis.