CAJ | 학술논문

本文分析了微透镜列阵衍射效应的影响因素,推导出了微透镜焦平面上光强分布的解析表达式,对菲涅尔数评价衍射效应的物理含义给予了合理的解释.并利用ZEMAX软件对微透镜列阵进行仿真,基于惠更斯子波直接积分的算法计算得到了微透镜列阵焦平面上的光场强度分布.通过比较不同条件下所得到的计算结果,验证了以菲涅尔数作为微透镜列阵衍射效应评价依据的的合理性,同时验证了以菲涅尔数判断焦斑间串扰的可行性.
본문분석료미투경렬진연사효응적영향인소,추도출료미투경초평면상광강분포적해석표체식,대비열이수평개연사효응적물리함의급여료합리적해석.병이용ZEMAX연건대미투경렬진진행방진,기우혜경사자파직접적분적산법계산득도료미투경렬진초평면상적광장강도분포.통과비교불동조건하소득도적계산결과,험증료이비열이수작위미투경렬진연사효응평개의거적적합이성,동시험증료이비열이수판단초반간천우적가행성.
Factors affecting diffraction of microlens array are analyzed,distribution expression of optical field intensity is deducted on the focal plane of microlens,and the prysical explanation about Fresnel number used for evaluating diffraction effect is given.Moreover,simulation of microlens array is carried out by ZEMAX software,and the distribution of optical intensity on the focal plane is calculated.At last,comparing calculating results under different conditions,the rationality of Fresnel number as validation criteria of diffraction effect and the feasibility of Fresnel number used to judge disturbance among focal spots are validated at the same time.