CAJ | 학술논문

提出了一种新型的非接触电容式小孔孔径测量方法,设计了专用测头,组建了小孔孔径自动测量系统.该系统采用视觉CCD和二维微调整机构,实现了精确的定位.用VC++6.0开发了应用软件,用来控制系统的自动运行,并完成标定、数据采集和数据处理.实验结果表明:此系统分辨率可以达到0.5 μm,重复性实验标准差可以达到0.81μm.
제출료일충신형적비접촉전용식소공공경측량방법,설계료전용측두,조건료소공공경자동측량계통.해계통채용시각CCD화이유미조정궤구,실현료정학적정위.용VC++6.0개발료응용연건,용래공제계통적자동운행,병완성표정、수거채집화수거처리.실험결과표명:차계통분변솔가이체도0.5 μm,중복성실험표준차가이체도0.81μm.
A high-precision,non-contact capacitance measuring method for pinhole diameter is introduced,and a special probe is designed.An automatic measuring system for pinhole diameter is formed.The system uses vision CCD and a two-dimensional micro-adjusting instrument to achieve precise position.The software is completed with VC++6.0,which can control to run automatically and compelete experimental data acquisition,calibration and data processsing.Experiments show that the resolution of this system is 0.5 μm and the standard deviation is 0.81 μm.