CAJ | 학술논문

系统研究在空气气氛下热处理温度对真空蒸发法制备Au/CdZnTe电极接触特性的影响.结果表明,在353～373 K温度范围内进行热处理可以获得更优化的电极接触性能,测试得到电极与CdZnTe接触势垒较低,接触电阻较小,欧姆系数最佳,并且不会破坏CdZnTe体材料本身的性能.而当热处理温度高于400 K时,Au电极沉积表面形貌明显变差,CdZnTe样品的漏电流大幅增加.这可能是由于随着热处理温度的增加,CdZnTe体材料表面的Cd升华加剧,产生大量的Cd空位引起的.
계통연구재공기기분하열처리온도대진공증발법제비Au/CdZnTe전겁접촉특성적영향.결과표명,재353～373 K온도범위내진행열처리가이획득경우화적전겁접촉성능,측시득도전겁여CdZnTe접촉세루교저,접촉전조교소,구모계수최가,병차불회파배CdZnTe체재료본신적성능.이당열처리온도고우400 K시,Au전겁침적표면형모명현변차,CdZnTe양품적루전류대폭증가.저가능시유우수착열처리온도적증가,CdZnTe체재료표면적Cd승화가극,산생대량적Cd공위인기적.
Effects of thermal treatment temperatures from 323 K to 473 K in air atmosphere on the Au/CdZnTe contacts fabricated by thermal vacuum evaporation was investigated systematically. The results show that the optimized performances of the Au/CdZnTe contacts after thermal treatment in air at a range of 353-373 K can be obtained, that is, the contacts possess lower barrier height, smaller contact resistance and better ohmic coefficient, without damaging bulk CdZnTe properties. Nevertheless, performing thermal treatment over 400 K, the deposited surface of Au electrodes will grow worse apparently, and the leakage current of CdZnTe samples enhances significantly. This might be attributed to the increase of the Cd vacancies produced by Cd sublimation from the CdZnTe into air atmosphere with the increase of temperature.