CAJ | 학술논문

为满足不同加工方式和加工条件下刀具对涂层的特殊要求,获得硬度高和耐摩擦性能优异的刀具涂层,采用反应磁控溅射方法制备了一系列不同碳含量的碳化铪薄膜.利用EDX,XRD,SEM,AFM和微力学探针表征了薄膜的微结构和力学性能,研究了C_2H_2分压(Ar和C_2H_2混合气体)对薄膜成分、相组成、微结构以及硬度和弹性模量的影响.结果表明,反应磁控溅射可以方便地制备碳化铪薄膜,但是,只有在C_2H_2分压为混合气体总压约3.0%附近很窄的范围内才可获得高硬度和高弹性模量的单相碳化铪薄膜,其最高硬度和弹性模量分别为27.9 GPa和255 GPa;低C_2H_2分压下所得薄膜由金属Hf和HfC两相组成,硬度较低;而过高的C_2H_2分压将导致薄膜形成非晶态,其硬度和弹性模量亦随之降低.
위만족불동가공방식화가공조건하도구대도층적특수요구,획득경도고화내마찰성능우이적도구도층,채용반응자공천사방법제비료일계렬불동탄함량적탄화협박막.이용EDX,XRD,SEM,AFM화미역학탐침표정료박막적미결구화역학성능,연구료C_2H_2분압(Ar화C_2H_2혼합기체)대박막성분、상조성、미결구이급경도화탄성모량적영향.결과표명,반응자공천사가이방편지제비탄화협박막,단시,지유재C_2H_2분압위혼합기체총압약3.0%부근흔착적범위내재가획득고경도화고탄성모량적단상탄화협박막,기최고경도화탄성모량분별위27.9 GPa화255 GPa;저C_2H_2분압하소득박막유금속Hf화HfC량상조성,경도교저;이과고적C_2H_2분압장도치박막형성비정태,기경도화탄성모량역수지강저.
Hafnium carbide coatings with different carbon contents were synthesized in Ar-C_2H_2 mixture by reactive magnetron sputtering. Energy-dispersive X-ray, X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to characterise their microstructure and mechanical properties. The effects of C_2H_2 partial pressure on the composition, phase, microstructure and mechanical properties of the coatings were investigated. The results show that hafnium carbide coatings can be synthesized at a low partial pressure of C_2H_2. The single phase HfC coating with columnar crystal and favorable mechanical properties could be obtained when the proportion of C_2H_2 partial pressure was only about 3.0% in the mixture, and the highest hardness and modulus were 27.9 GPa and 255 GPa respectively. The coating contains metal Hf and HfC phases and obtains low hardness under lower C_2H_2 partial pressure. When the C_2H_2 partial pressure is higher, the hardness and elastic modulus of acquired amorphous coatings decrease significantly.