CAJ | 학술논문

采用多元等离子体浸没离子注入与沉积制备TiAlSiN纳米复合涂层,利用EDX,XRD,SEM,XPS,纳米探针和划痕试验对涂层成分组成、微结构和机械性能进行测试分析.XRD测试表明,TiAlSiN涂层具有较强的TiN(200)择优取向.XPS测试表明,TiAlSiN涂层中也含有AlN、Si3N4、Al2O3和Ti2O3.与制备的TiN涂层相比,当涂层中的Si含量为0.9％时,TiAlSiN涂层表现出较高的硬度,达32 GPa,但涂层的断裂韧性和结合强度较低；当涂层中的Si含量增加至6.0％时,TiAlSiN涂层具有超高的硬度57 GPa,并表现出较好的断裂韧性和结合强度.
채용다원등리자체침몰리자주입여침적제비TiAlSiN납미복합도층,이용EDX,XRD,SEM,XPS,납미탐침화화흔시험대도층성분조성、미결구화궤계성능진행측시분석.XRD측시표명,TiAlSiN도층구유교강적TiN(200)택우취향.XPS측시표명,TiAlSiN도층중야함유AlN、Si3N4、Al2O3화Ti2O3.여제비적TiN도층상비,당도층중적Si함량위0.9％시,TiAlSiN도층표현출교고적경도,체32 GPa,단도층적단렬인성화결합강도교저；당도층중적Si함량증가지6.0％시,TiAlSiN도층구유초고적경도57 GPa,병표현출교호적단렬인성화결합강도.
TiAlSiN nanocomposite coatings were prepared by multi-plasma immersion ion implantation and deposition (MPIIID).The chemical composition,microstructure and mechanical properties of these coatings were investigated by energy dispersive X-ray (EDX),scanning electron microscopy (SEM),X-ray diffraction (XRD),X-ray photoelectron spectroscopy (XPS),nan indentation and scratch tests.XRD patterns reveal that the main reflection in the as-deposited coating corresponds to a strong TiN (2 1) preferred orientation.XPS results show that AlN,Si3N4,Al2O3 and Ti2O3 are also formed in the coating.Comparing with the TiN coating,when the Si content in the coating is 0.9％,the film shows an increased hardness of 32 GPa,while its fracture toughness and adhesion strength are weak.When the Si content is increased to 6.0％,the coating exhibits a super hardness of 57 GPa as well as excellent fracture toughness and adhesion strength.