CAJ | 학술논문

文中介绍了用掺锡的氧化铟导电膜作为加热方式并采用比例积分微分方式通过A/D卡输出电平控制加热电压，实现高精度温控，重点是针对小热容加热体的特点采用相应的措施通过比例积分微分控制实现精确控温。初步研制成了高发射率、可持续工作并能实现精确控温的高精度薄膜电阻加热板。
문중개소료용참석적양화인도전막작위가열방식병채용비례적분미분방식통과A/D잡수출전평공제가열전압，실현고정도온공，중점시침대소열용가열체적특점채용상응적조시통과비례적분미분공제실현정학공온。초보연제성료고발사솔、가지속공작병능실현정학공온적고정도박막전조가열판。
The accurate temperature control method uses the ITO thin film to heat up the glass and uses PID to control the heating voltage by the output voltage of A/D circuit board. How to control temperature accurately by PID when the heater's thermal capacity is small is the main point of this paper. The pellicle resistance heater which can work continuously and has high emissivity is primarily developed. Its temperature can be accurately controlled.