北京师范大学学报(自然科学版)
北京師範大學學報(自然科學版)
북경사범대학학보(자연과학판)
JOURNAL OF BEIJING NORMAL UNIVERSITY (NATURAL SCIENCE)
2001年
2期
174-179
,共6页
李庚伟%吴正龙%杨锡震%杨少延%张建辉%刘志凯
李庚偉%吳正龍%楊錫震%楊少延%張建輝%劉誌凱
리경위%오정룡%양석진%양소연%장건휘%류지개
ZnO/Si异质结构%X射线光电子能谱(XPS)%氧离子束辅助(O+-assisted)PLD
ZnO/Si異質結構%X射線光電子能譜(XPS)%氧離子束輔助(O+-assisted)PLD
ZnO/Si이질결구%X사선광전자능보(XPS)%양리자속보조(O+-assisted)PLD
利用X射线光电子能谱深度剖析方法对ZnO/Si异质结构进行了分析.用该法可生长出正化学比的ZnO,不过生长的ZnO薄膜存在孔隙，工艺还有待进一步改进.
利用X射線光電子能譜深度剖析方法對ZnO/Si異質結構進行瞭分析.用該法可生長齣正化學比的ZnO,不過生長的ZnO薄膜存在孔隙，工藝還有待進一步改進.
이용X사선광전자능보심도부석방법대ZnO/Si이질결구진행료분석.용해법가생장출정화학비적ZnO,불과생장적ZnO박막존재공극，공예환유대진일보개진.
Heteroepitaxial structure ZnO/Si(111) grown by O+-assisted pulsed laser deposition (PLD) has been investigated by using X-ray photoelectron spectroscopy (XPS) depth profile measurements. The experiments show that the thin films grown on Si(111) are stoichiometric ZnO. It indicates that the growth method is practicable. And there are porosities in the thin film, the technology needs improving.
