CAJ | 학술논문

对PZT厚膜驱动的微变形镜(DM)进行了结构优化设计.基于有限元方法(FEM),分析了结构中各个参数对变形镜性能的影响.优化结果表明,单元边长1.75 mm的驱动器,在最优参数下冲程可达2～5 μm@100 V,且加载镜面后驱动器的位移损失小于12%,带镜面负载能力强.根据优化结果制备了压电厚膜微驱动器阵列,驱动器的冲程可达4.5 μm@100 V,并与有限元方法的结果进行了分析比较.
대PZT후막구동적미변형경(DM)진행료결구우화설계.기우유한원방법(FEM),분석료결구중각개삼수대변형경성능적영향.우화결과표명,단원변장1.75 mm적구동기,재최우삼수하충정가체2～5 μm@100 V,차가재경면후구동기적위이손실소우12%,대경면부재능력강.근거우화결과제비료압전후막미구동기진렬,구동기적충정가체4.5 μm@100 V,병여유한원방법적결과진행료분석비교.
The structure optimization for piezoelectrically actuated deformable mirror (DM) based on PZT thick film was performed. The influence of structure parameters on performances of DM was analyzed by finite element method (FEM). The optimization results showed that the 1.75 mm square PZT thick film actuator with optimized parameters could obtain a stroke as high as 2～5 μm@100 V, and the reduction of the actuator stroke caused by assembling a mirror was lower than 12%, which represented a high load capability. Furthermore, actuator arrays based on PZT thick film were fabricated and characterized. The actuator stroke was about 4.5 μm@100 V, and the experimental results were compared to the simulated ones.