CAJ | 학술논문

本文研究了TiO2和SiO2溶胶-凝胶光学膜在低温热处理下的组分、形貌特征、光散射特性.AES分析结果表明,在TiO2膜和SiO2膜的交界面处,Ti和Si相互扩散,从而证实了在多层膜中,膜层之间、膜层和基底之间有Ti-O-Si(或Si-O-Ti,或Si-O-Si)化学键形成.AES和ESCA分析结果显示溶胶-凝胶膜经过低温处理后C的含量较高,这归结为溶胶-凝胶膜的工艺特点.AFM测试结果显示,溶胶-凝胶TiO2光学膜的表面形貌具有显著的柱状结构,薄膜表面起伏大约是7.5nm.TiO2,SiO2单层膜的表面散射率随着热处理温度的提高而变大,对于不同陈化时间的溶液镀制的膜有不同的表面散率.
본문연구료TiO2화SiO2용효-응효광학막재저온열처리하적조분、형모특정、광산사특성.AES분석결과표명,재TiO2막화SiO2막적교계면처,Ti화Si상호확산,종이증실료재다층막중,막층지간、막층화기저지간유Ti-O-Si(혹Si-O-Ti,혹Si-O-Si)화학건형성.AES화ESCA분석결과현시용효-응효막경과저온처리후C적함량교고,저귀결위용효-응효막적공예특점.AFM측시결과현시,용효-응효TiO2광학막적표면형모구유현저적주상결구,박막표면기복대약시7.5nm.TiO2,SiO2단층막적표면산사솔수착열처리온도적제고이변대,대우불동진화시간적용액도제적막유불동적표면산솔.
In this paper,TiO2 and SiO2 sol-gel optical coatings' element,structure,surfacemorphology and light scatter properties under different process and low heat treatment temperature are investigated.AES result shows,in the alternative TiO2 and SiO2 multi-layer interference coatings,there's a small quantity of Si and Ti diffused into each other's side at their interface and Ti-O-Si(or Si-O-Ti)chemical bond is formed in the layer's interface region.Either TiO2 or SiO2 film has a high content of carbon that is caused by the character of sol-gel process.AFM result shows,sol-gel TiO2 single layer films' surface morphology has an apparent shape like column.The films' surface undulation is about 7.5nm.The surface scattering loss of the coatings increases with increasing annealing temperature,the film made from sol of different aging time has different scatting loss.