计算机集成制造系统
計算機集成製造繫統
계산궤집성제조계통
COMPUTER INTEGRATED MANUFACTURING SYSTEMS
2010年
1期
109-114,126
,共7页
半导体制造%多集束型装备%双臂机械手%缓冲加工模块%并行机%调度
半導體製造%多集束型裝備%雙臂機械手%緩遲加工模塊%併行機%調度
반도체제조%다집속형장비%쌍비궤계수%완충가공모괴%병행궤%조도
semiconductor manufacturing%multiple-cluster tools%dual-blade robot%buffer process modules%parallel machines%scheduling
为解决机械手活动序列和产能分析这一半导体制造业多集束型装备调度的关键问题,研究了一类通用的多集束型装备机械手调度中的k晶圆周期序列问题,证明了k晶圆周期序列的平均周期下界.提出了一种构造k晶圆周期序列的策略和实现该策略的构造算法,并根据构造算法推导出了平均周期的表达式.最后,通过仿真数据和国内某Track机厂商的真实数据验证了该策略的优越性和实用性.
為解決機械手活動序列和產能分析這一半導體製造業多集束型裝備調度的關鍵問題,研究瞭一類通用的多集束型裝備機械手調度中的k晶圓週期序列問題,證明瞭k晶圓週期序列的平均週期下界.提齣瞭一種構造k晶圓週期序列的策略和實現該策略的構造算法,併根據構造算法推導齣瞭平均週期的錶達式.最後,通過倣真數據和國內某Track機廠商的真實數據驗證瞭該策略的優越性和實用性.
위해결궤계수활동서렬화산능분석저일반도체제조업다집속형장비조도적관건문제,연구료일류통용적다집속형장비궤계수조도중적k정원주기서렬문제,증명료k정원주기서렬적평균주기하계.제출료일충구조k정원주기서렬적책략화실현해책략적구조산법,병근거구조산법추도출료평균주기적표체식.최후,통과방진수거화국내모Track궤엄상적진실수거험증료해책략적우월성화실용성.
To deal with the activity sequence of robot and the throughout analysis which were crucial for multi-cluster tools scheduling in semiconductor manufacturing, the k wafer cycle sequence problem in multi-cluster tools schedu-ling was studied. The lower bound of per wafer cycle time for k wafer cycle sequence was proved. The policy of k wafer cycle sequence and its construction algorithm were proposed, and the expression of per wafer cycle time was derived by the proposed algorithm. Finally, the superiority and the practical value of the mentioned policy were vali-dated by the simulation results and the practical data from a Chinese Track manufacturing company.
