CAJ | 학술논문

利用全息曝光方法制备了分布反馈量子级联激光器的光栅掩模,选择和发展了恰当的用于InGaAs/InP材料的光栅腐蚀优化工艺,得到腐蚀规律,讨论了腐蚀机制.在量子级联激光器的In-GaAs/InP层上制备光栅得到分布反馈量子级联激光器,其单模特性较好,信噪比大于30dB.
이용전식폭광방법제비료분포반궤양자급련격광기적광책엄모,선택화발전료흡당적용우InGaAs/InP재료적광책부식우화공예,득도부식규률,토론료부식궤제.재양자급련격광기적In-GaAs/InP층상제비광책득도분포반궤양자급련격광기,기단모특성교호,신조비대우30dB.
In this paper, first order gratings for InP based distributed feedback quantum cascade lasers ( DFB - QCL) were fabricated by holographic lithography and wet chemical etching. The etching process was optimized for small patterns and good grating profiles. DFB QCL operating at room temperature in pulsed mode was demonstrated with a high side mode suppression ratio of about 30dB. The device results indicate the high quality of gratings.