CAJ | 학술논문

应用光学自准直原理,选用激光二极管(LD)为光源,位置敏感探测器(PSD)为光电探测器,构建了一种基于互相关分析的激光自准直小角度测量系统.为了提高小角度测量精度,该系统对光源进行正弦调制,利用互相关分析解调出待测小角度信息.根据互相关分析理论,设计了信号处理系统,对影响系统精度的主要因素进行了分析.实现了测量样机,并进行了性能测试实验.实验表明,互相关解调系统有效地抑制了噪声的影响,样机具有较高的二维小角度测量精度和示值稳定性,在±150″范围内,最大非线性误差为0.6″,重复性误差为0.2″,漂移为0.4″/4 h.
응용광학자준직원리,선용격광이겁관(LD)위광원,위치민감탐측기(PSD)위광전탐측기,구건료일충기우호상관분석적격광자준직소각도측량계통.위료제고소각도측량정도,해계통대광원진행정현조제,이용호상관분석해조출대측소각도신식.근거호상관분석이론,설계료신호처리계통,대영향계통정도적주요인소진행료분석.실현료측량양궤,병진행료성능측시실험.실험표명,호상관해조계통유효지억제료조성적영향,양궤구유교고적이유소각도측량정도화시치은정성,재±150″범위내,최대비선성오차위0.6″,중복성오차위0.2″,표이위0.4″/4 h.
A laser autocollimation measurement system based on optical autocollimation principle was put forward for small angle measurement, using laser diode (LD) as light source and position sensitive detector(PSD) as a laser spot detector. In order to improve the precision, the small angle measurement system adopted cross correlation analysis to modulate LD with sine-wave. Through cross correlation demodulation, the small angle to be measured was then extracted from the output of PSD. The signal processing system for small angle demodulation was designed and some factors influencing the accuracy were discussed. Finally, this paper gave a prototype of laser autocollimation measurement system and its performance tests. The prototype shows high precision and stability for 2-D small angle measurement, with the maximum nonlinear error of 0.6″, the repeatability error of 0.2″ and the drift of 0.4″/4 h within the range of ±150″.