光学学报
光學學報
광학학보
ACTA OPTICA SINICA
2000年
12期
1667-1674
,共8页
付雷%辛建国%史红民%倪受庸%桑凤亭%陆耀东%王麟
付雷%辛建國%史紅民%倪受庸%桑鳳亭%陸耀東%王麟
부뢰%신건국%사홍민%예수용%상봉정%륙요동%왕린
二维剪切(错位)%干涉%强激光%腔镜变形检测。
二維剪切(錯位)%榦涉%彊激光%腔鏡變形檢測。
이유전절(착위)%간섭%강격광%강경변형검측。
2-D shearing%interference%high power laser%measurement of resonator mirror deformation
介绍一种分光路二维剪切干涉光电检测系统。该系统实现了两正交方向(二维)同时进行检测与计算机自动化数据处理；采用了一系列消噪声措施和两图像相减等技术，使得波前重构中能较好地采用简单的数值积分方法；并得到了在士10μm的测量范围内，方差不超过0．257μm和0．05μm的灵敏度。利用该系统成功地对强激光腔镜变形过程实现了动态检测。
介紹一種分光路二維剪切榦涉光電檢測繫統。該繫統實現瞭兩正交方嚮(二維)同時進行檢測與計算機自動化數據處理；採用瞭一繫列消譟聲措施和兩圖像相減等技術，使得波前重構中能較好地採用簡單的數值積分方法；併得到瞭在士10μm的測量範圍內，方差不超過0．257μm和0．05μm的靈敏度。利用該繫統成功地對彊激光腔鏡變形過程實現瞭動態檢測。
개소일충분광로이유전절간섭광전검측계통。해계통실현료량정교방향(이유)동시진행검측여계산궤자동화수거처리；채용료일계렬소조성조시화량도상상감등기술，사득파전중구중능교호지채용간단적수치적분방법；병득도료재사10μm적측량범위내，방차불초과0．257μm화0．05μm적령민도。이용해계통성공지대강격광강경변형과정실현료동태검측。
An optical- path- splitting 2- D shearing interferometric opto-electronic measuring system is introduced. The tests in two orthogonal directions can be implemented at the same time and the automation of data processing is achieved with the system and the simple method of digital integration can be well adopted in the wavefront reconstruction by taking a series of steps of removing noise and subtracting the mirror surface datum before and after the deformation. The measuring standard error is below 0. 257 μm within±10 μm range of the deformation and the sensitivity is 0. 05 μm. The deformation dynamic tests of high power laser resonator mirror was successfully demonstrated in real time.
