CAJ | 학술논문

利用溶胶凝胶法在Si(100)和LNO/Si(100)衬底上成功制备了Zn-Mn共掺钛酸钡薄膜.为了更充分地研究掺杂量对薄膜的晶体微结构和铁电性的影响,利用同样的方法分别制备了不同掺杂量的掺Zn和掺Mn钛酸钡薄膜.X射线衍射和原子力显微镜测量的结果表明薄膜均匀致密,且平均晶粒尺寸在30nm以内.通过比较400～700nm范围内各钛酸钡薄膜的折射率和消光系数,可以得到,其禁带宽度随着掺Zn或掺Mn量的变化而变化.对薄膜的铁电性能进行研究表明,Zn-Mn钛酸钡具有良好的铁电性,其剩余极化值为11.26μC/cm2,说明微量的Zn-Mn共掺可以增强薄膜的铁电性.
이용용효응효법재Si(100)화LNO/Si(100)츤저상성공제비료Zn-Mn공참태산패박막.위료경충분지연구참잡량대박막적정체미결구화철전성적영향,이용동양적방법분별제비료불동참잡량적참Zn화참Mn태산패박막.X사선연사화원자력현미경측량적결과표명박막균균치밀,차평균정립척촌재30nm이내.통과비교400～700nm범위내각태산패박막적절사솔화소광계수,가이득도,기금대관도수착참Zn혹참Mn량적변화이변화.대박막적철전성능진행연구표명,Zn-Mn태산패구유량호적철전성,기잉여겁화치위11.26μC/cm2,설명미량적Zn-Mn공참가이증강박막적철전성.
Zn-Mn co-doped BaTiO3 films were fabricated on Si (100) and LNO/Si (100) substrates by a sol-gel procedure.In order to study the effects of different doping levels on the microstructure and ferroelectric phase of BaTiO3 thin films,-BTO films doped with Zn and Mn,respectively,were also investigated.Both the characterization of X-ray diffraction (XRD) and atomic force microscope (AFM) indicate uniform and dense films with average grain size under 30nm.By comparisons of the optical constant refractive index and extinction coefficient of BaTiO3 films in the wavelength from 400 nm to 700 nm,it was obtained that there is a change in the optical band gap due to the different amount of Zn and Mn added.Furthermore,a better defined P-E loop with a remnant polarization of 11.26 μC/cm2 shows that Zn and Mn dopanting play an essential role in ferroelectric improvement.