CAJ | 학술논문

使用自行搭建的高压脉冲大电源,并且利用PLC的控制SCR触发装置产生微秒级单脉冲进行了弧光放电。在一定电压、一定气压、一定距离下,进行了薄膜制备,对薄膜进行了电镜分析和XRD分析。说明在合适的电压、气压和距离下,用该套设备可以制备出比较均匀、结晶性能比较好的薄膜。
사용자행탑건적고압맥충대전원,병차이용PLC적공제SCR촉발장치산생미초급단맥충진행료호광방전。재일정전압、일정기압、일정거리하,진행료박막제비,대박막진행료전경분석화XRD분석。설명재합괄적전압、기압화거리하,용해투설비가이제비출비교균균、결정성능비교호적박막。
We use a self-built high-voltage pulsed power get the glow discharge and the use of PLC control SCR triggering device for generating a single pulse microsecond are discharge, and we measured discharge-voltage and discharge-current with an oscilloscope. We plate films in different voltages, distances and pressures. We analysis the films through the ways of electron microscopy and XRD methods. We prepare better uniform films which have good crystallization properties in appropriate voltage, air pressure and distance.