CAJ | 학술논문

波前功率谱密度(PSD)被用于评价ICF激光驱动器光学元件在中频区域的波前误差。目前主要采用大口径相移干涉仪检测ICF光学元件的波前畸变，通过傅里叶变换获得波前的PSD分布。相移干涉仪在较高空间频率分量的测量上存在失真效应，因此需对干涉仪的空间频率传递函数进行校准，采用位相比较法测量大口径相移干涉仪的系统传递函数。为此，利用衍射光学元件的制造工艺，设计、制作了标准的透射和反射位相元件，比较理论计算值与实测PSD值，分别获得了大口径相移干涉仪透射、反射测量模式的系统传递函数。
파전공솔보밀도(PSD)피용우평개ICF격광구동기광학원건재중빈구역적파전오차。목전주요채용대구경상이간섭의검측ICF광학원건적파전기변，통과부리협변환획득파전적PSD분포。상이간섭의재교고공간빈솔분량적측량상존재실진효응，인차수대간섭의적공간빈솔전체함수진행교준，채용위상비교법측량대구경상이간섭의적계통전체함수。위차，이용연사광학원건적제조공예，설계、제작료표준적투사화반사위상원건，비교이론계산치여실측PSD치，분별획득료대구경상이간섭의투사、반사측량모식적계통전체함수。
The wavefront power spectral density (PSD) is being adopted for specifying the large optical components employed in high power density solid-state laser for inertial confinement fusion (ICF). The phase wavefront detected by the interferometer is digitally processed to create the one dimension wavefront PSD. There're anamorphic effects for measuring the wavefront's components with high spatial frequencies. It's necessary to calibrate the system transfer function of the interferometer. Based on the principle of phase comparing, we have designed and fabricated a 100-mm-diameter standard phase object that contained a step phase. The system transfer functions of the transmitted measuring mode and the reflective measuring mode for the WYKO 24-inch interferometer have been respectively obtained by comparing the theoretical values and the measured value of the PSD. The analysis and the experimental result are discussed in this paper.