CAJ | 학술논문

介绍了直梁光栅光调制器的结构和原理,建立了器件的机电模型.利用能量法和卡式第二定理分析并得到器件的弹性系数;通过静电力与机械回复力的平衡,得到器件的驱动电压.结合器件的实际参数值,计算得到器件的工作电压为10.71 V,吸合电压为11.46 V.实验测得器件的实际工作电压为10.5 V,吸合电压为12.2 V,实验结果与理论分析基本一致.在1 kHz脉冲电压的驱动下,器件响应的上升时间和下降时间分别为46.59 μs和44.77μs;器件的响应频率约为5 kHz.结果表明,加工的直梁光栅光调制器具有较低的驱动电压和较高的响应频率,能够满足微投影显示的要求.
개소료직량광책광조제기적결구화원리,건립료기건적궤전모형.이용능량법화잡식제이정리분석병득도기건적탄성계수;통과정전력여궤계회복력적평형,득도기건적구동전압.결합기건적실제삼수치,계산득도기건적공작전압위10.71 V,흡합전압위11.46 V.실험측득기건적실제공작전압위10.5 V,흡합전압위12.2 V,실험결과여이론분석기본일치.재1 kHz맥충전압적구동하,기건향응적상승시간화하강시간분별위46.59 μs화44.77μs;기건적향응빈솔약위5 kHz.결과표명,가공적직량광책광조제기구유교저적구동전압화교고적향응빈솔,능구만족미투영현시적요구.
The structure and operating principle of a straight-beam grating light modulator (GLM) were introduced and the electromechanical model of the device was established,whose elastic coefficient was obtained using energy method and Castigliano's second theorem.The driving voltage of the device was calculated with balance equation between the electrostatic force and the mechanical restoration force.Considering the real values of the parameters,the operating voltage and the pull-in voltage of the device are 10.71 V and 11.46 V respectively in theory.In the experiment the operating voltage and the pull-in voltage were 10.5 V and 12.2 V respectively,which was basically in accordance with the theory.When the GLM was actuated by a square-wave voltage with 1 kHz frequency,the rising time and the falling time of its intensity response were about 46.59 μs and 44.77 μs respectively.The response frequency of GLM was about 5 kHz.The results indicate that the fabricated GLM has a low driving voltage and a high response frequency,which can satisfy the need of projection display.