光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2009年
7期
1694-1700
,共7页
莫尔条纹%细分%相位%补偿
莫爾條紋%細分%相位%補償
막이조문%세분%상위%보상
Moiré fringe%subdivision%phase%compensation
为减小莫尔条纹信号不正交时的正切法细分误差,提出了一种可对任意相位滞后误差进行实时补偿的新算法.在分析了相位不正交对细分精度的影响后,通过对信号过零点的准确采样,计算出余弦信号相位滞后的角度值,进而确定了实际的相位计算公式.根据存在相位滞后信号的极性和幅值信息,对完整的短周期信号进行相位分段补偿,并分析了影响算法实现的各个因素.仿真实验表明,本算法可实现对相位滞后误差的实时补偿,有效降低信号相位不正交对细分精度的影响,使细分误差仅为未补偿误差的10%,极大地提高了莫尔条纹信号细分精度和位移检测精度.
為減小莫爾條紋信號不正交時的正切法細分誤差,提齣瞭一種可對任意相位滯後誤差進行實時補償的新算法.在分析瞭相位不正交對細分精度的影響後,通過對信號過零點的準確採樣,計算齣餘絃信號相位滯後的角度值,進而確定瞭實際的相位計算公式.根據存在相位滯後信號的極性和幅值信息,對完整的短週期信號進行相位分段補償,併分析瞭影響算法實現的各箇因素.倣真實驗錶明,本算法可實現對相位滯後誤差的實時補償,有效降低信號相位不正交對細分精度的影響,使細分誤差僅為未補償誤差的10%,極大地提高瞭莫爾條紋信號細分精度和位移檢測精度.
위감소막이조문신호불정교시적정절법세분오차,제출료일충가대임의상위체후오차진행실시보상적신산법.재분석료상위불정교대세분정도적영향후,통과대신호과영점적준학채양,계산출여현신호상위체후적각도치,진이학정료실제적상위계산공식.근거존재상위체후신호적겁성화폭치신식,대완정적단주기신호진행상위분단보상,병분석료영향산법실현적각개인소.방진실험표명,본산법가실현대상위체후오차적실시보상,유효강저신호상위불정교대세분정도적영향,사세분오차부위미보상오차적10%,겁대지제고료막이조문신호세분정도화위이검측정도.
In order to eliminate the tangent subdivision error caused by nonorthogonal Moiré fringe signals, a new algorithm is presented to compensate the real-time phase laggard error. After analyzing the effect of the phase nonorthogonality on subdivision precision, the cosine signal phase error is worked out based on sampling the signal with zero value well and the actual phase formula is determined clearly. According to the polarity and amplitude of the signal with laggard phases,the shorter periodic signals are compensated in a certain section phase respectively and the factors influencing the compensation precision are analyzed. Experimental data indicate that this algorithm can compensate the phase error perfectly and can depress the effect of the nonorthogonal signals on the subdivision precision. Obtained results show that the subdivision error by using the proposed method reduces to 10 percent of the original error and the subdivision and location precisions are improved greatly.