CAJ | 학술논문

在甲烷和氢气的混合系统中,利用石英管型微波等离子体化学气相沉积方法,在硅片上制备了新型的纳米片状碳膜.利用场发射扫描电子显微镜和拉曼光谱仪对碳膜的结构进行了表征,结果表明碳膜是由长1μm、宽100nm的纳米碳片相互缠绕而成.最后简单讨论了新型碳纳米片的形成机理.
재갑완화경기적혼합계통중,이용석영관형미파등리자체화학기상침적방법,재규편상제비료신형적납미편상탄막.이용장발사소묘전자현미경화랍만광보의대탄막적결구진행료표정,결과표명탄막시유장1μm、관100nm적납미탄편상호전요이성.최후간단토론료신형탄납미편적형성궤리.
A new-style carbon films was prepared on Si wafers by means of a quartz-tube-type microwave plasma chemical vapor deposition(MWPCVD) method with a hydrogen-methane gas mixture. The structure of the carbon films was characterized by field emission scanning electron microscopy(FESEM) and Raman spectroscopy. It was indicated that the carbon films were composed of nano-structured carbon sheets with about 100nm width and 1μm length and complicatedly twisted. The formation mechanism of the carbon nano-sheets was simply discussed.