CAJ | 학술논문

提出了一种新的光学临近矫正算法.首先建立了一套高效并且适用性强的规则描述,然后提出了一种新的规则运用方法.算法在规则数据表的基础上通过v-SVR方法建立规则描述同矫正数据之间的数学表达式,使得对于任意输入的规则描述都能够精确计算出相应的矫正数据.实验结果表明,该算法比传统的查表插值方法具有更高的精度.
제출료일충신적광학림근교정산법.수선건립료일투고효병차괄용성강적규칙묘술,연후제출료일충신적규칙운용방법.산법재규칙수거표적기출상통과v-SVR방법건립규칙묘술동교정수거지간적수학표체식,사득대우임의수입적규칙묘술도능구정학계산출상응적교정수거.실험결과표명,해산법비전통적사표삽치방법구유경고적정도.
A new approach for rules-based optical proximity correction is presented. The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base. Based on those ideas, several primary rules are suggested. The v-support vector regression method is used to generate a mathematical expression according to rule data. It enables to make correction according to any given rules parameters. Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.