半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2008年
4期
650-654
,共5页
白钰%哈克%鲁富翰%蒋雪茵%张志林
白鈺%哈剋%魯富翰%蔣雪茵%張誌林
백옥%합극%로부한%장설인%장지림
有机薄膜晶体管%修饰电极%双绝缘层%迁移率
有機薄膜晶體管%脩飾電極%雙絕緣層%遷移率
유궤박막정체관%수식전겁%쌍절연층%천이솔
organic thin film transistor%modified electrode%bilayer insulator%mobility
研究了具有OTS/SiO2双绝缘层结构及MoO3/Al电极结构的有机薄膜晶体管.器件是以热生长的Si02作为有机薄膜晶体管的栅绝缘层,酞菁铜作为有源层的.OTS/SiO2双绝缘层的结构提高了器件的场效应迁移率和开关电流比,降低了阈值电压.实验表明在同样的栅极电压下,具有MoO3/Al电极的器件和金电极的器件有着相似的源漏输出电流.结果显示具有OTS/SiO2双绝缘层及MoO3/Al电极结构的器件能有效改进有机薄膜晶体管的性能.
研究瞭具有OTS/SiO2雙絕緣層結構及MoO3/Al電極結構的有機薄膜晶體管.器件是以熱生長的Si02作為有機薄膜晶體管的柵絕緣層,酞菁銅作為有源層的.OTS/SiO2雙絕緣層的結構提高瞭器件的場效應遷移率和開關電流比,降低瞭閾值電壓.實驗錶明在同樣的柵極電壓下,具有MoO3/Al電極的器件和金電極的器件有著相似的源漏輸齣電流.結果顯示具有OTS/SiO2雙絕緣層及MoO3/Al電極結構的器件能有效改進有機薄膜晶體管的性能.
연구료구유OTS/SiO2쌍절연층결구급MoO3/Al전겁결구적유궤박막정체관.기건시이열생장적Si02작위유궤박막정체관적책절연층,태정동작위유원층적.OTS/SiO2쌍절연층적결구제고료기건적장효응천이솔화개관전류비,강저료역치전압.실험표명재동양적책겁전압하,구유MoO3/Al전겁적기건화금전겁적기건유착상사적원루수출전류.결과현시구유OTS/SiO2쌍절연층급MoO3/Al전겁결구적기건능유효개진유궤박막정체관적성능.
An organic thin-film transistor (OTFT) with an OTS/SiO2 bilayer gate insulator and a MoO3/Al electrode configuration between gate insulator and source/drain electrodes has been investigated. A thermally grown SiO2 layer is used as the OTFT gate dielectric and copper phthalocyanine(CuPc) is used as an active layer. This OTS/SiO2 bilayer gate insulator configuration increases the field-effect mobility, reduces the threshold voltage, and improves the on/off ratio simultaneously. The device with a MoO3/Al electrode has shown similar Ids compared to the device with an Au electrode at the same gate voltage. Our results indicate that using a double-layer of electrodes and a double-layer of insulators is an effective way to improve OTFT performance.