CAJ | 학술논문

为了无需辅助元件就能够实现对大口径非球面的检测,将子孔径拼接技术与干涉技术相结合,提出了一种利用子孔径拼接干涉检测非球面的新方法.分析了该技术的基本原理,并基于齐次坐标变换、最小二乘拟合建立了一种综合优化的拼接模型,在此基础上初步设计和搭建了子孔径拼接干涉检测装备.利用该方法对一口径为350 mm的双曲面进行了5个子孔径的拼接检测,得到拼接后的全口径面形误差的PV值为0.319λ,RMS值为0.044λ(=632.8 nm).为了对比和验证,对该非球面进行了零位补偿检测,两种方法测量所得的全口径面形分布是一致的,其PV值和RMS值的偏差分别为0.032λ和0.004λ.实验结果表明:该数学模型和拼接算法是准确可行的,从而提供了一种非零补偿测试大口径非球面的手段.
위료무수보조원건취능구실현대대구경비구면적검측,장자공경병접기술여간섭기술상결합,제출료일충이용자공경병접간섭검측비구면적신방법.분석료해기술적기본원리,병기우제차좌표변환、최소이승의합건립료일충종합우화적병접모형,재차기출상초보설계화탑건료자공경병접간섭검측장비.이용해방법대일구경위350 mm적쌍곡면진행료5개자공경적병접검측,득도병접후적전구경면형오차적PV치위0.319λ,RMS치위0.044λ(=632.8 nm).위료대비화험증,대해비구면진행료령위보상검측,량충방법측량소득적전구경면형분포시일치적,기PV치화RMS치적편차분별위0.032λ화0.004λ.실험결과표명:해수학모형화병접산법시준학가행적,종이제공료일충비령보상측시대구경비구면적수단.
In order to test large aspheric surfaces without the aid of null optics, a novel method called subaperture stitching interferometry (SSI) is presented. The synthetical optimization stitching model are established based on homogeneous oordinate's transform and simultaneous least-squares fitting. A prototype of testing large aspheres is developed by the stitching method. The experiment of testing a hyperboloid with SSI is carried out. The PV and RMS of the surface are 0.319λ and 0.044λ ( is 632.8 nm) respectively when five subapertures are stitched together. For comparison and validation, the asphere is also measured by null testing. It is shown that the two testing results consist with each other, PV and RMS error are 0.032λ and 0.004λ respectively. Thus, it can be concluded that the algorithm and model of the SSI technology are feasible for the testing of large aspheric surfaces, which provides the probability of testing the mirror with large aperture and asphericity in non-null configuration.