半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2006年
3期
473-477
,共5页
孙远程%鲍敏杭%杨恒%黄宜平
孫遠程%鮑敏杭%楊恆%黃宜平
손원정%포민항%양항%황의평
压膜空气阻尼%微电子机械系统%槽板%雷诺方程
壓膜空氣阻尼%微電子機械繫統%槽闆%雷諾方程
압막공기조니%미전자궤계계통%조판%뢰낙방정
squeeze-film air damping%MEMS%slotted plate%Reynolds equation
推导出了一个适用于槽板结构压膜空气阻尼的微分方程.该方程与传统雷诺方程的区别是在雷诺方程的左边增加了一个用以表示气体从槽流出所引起的阻尼效应的修正项,并考虑了槽中有限气流通道长度的端头修正.在适当的边界条件下,利用此方程可以求解槽板压膜阻尼的压强分布、阻尼力和阻尼力系数.该槽板结构压膜空气阻尼的微分方程对槽板的厚度和横向尺度没有限制,为分析有限尺寸和有限厚度槽板的压膜空气阻尼提供了一个有用的方法.
推導齣瞭一箇適用于槽闆結構壓膜空氣阻尼的微分方程.該方程與傳統雷諾方程的區彆是在雷諾方程的左邊增加瞭一箇用以錶示氣體從槽流齣所引起的阻尼效應的脩正項,併攷慮瞭槽中有限氣流通道長度的耑頭脩正.在適噹的邊界條件下,利用此方程可以求解槽闆壓膜阻尼的壓彊分佈、阻尼力和阻尼力繫數.該槽闆結構壓膜空氣阻尼的微分方程對槽闆的厚度和橫嚮呎度沒有限製,為分析有限呎吋和有限厚度槽闆的壓膜空氣阻尼提供瞭一箇有用的方法.
추도출료일개괄용우조판결구압막공기조니적미분방정.해방정여전통뢰낙방정적구별시재뢰낙방정적좌변증가료일개용이표시기체종조류출소인기적조니효응적수정항,병고필료조중유한기류통도장도적단두수정.재괄당적변계조건하,이용차방정가이구해조판압막조니적압강분포、조니력화조니력계수.해조판결구압막공기조니적미분방정대조판적후도화횡향척도몰유한제,위분석유한척촌화유한후도조판적압막공기조니제공료일개유용적방법.
A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation. A term is added to account for the effect of airflow through the slots on the air damping of the plate. The end effect of the airflow in the slots is also treated by substituting an effective channel length for the geometric channel length (i. e. the thickness of the plate). The damping pressure distribution, damping force, and damping force coefficient of the slotted plates can be found by solving the equation under appropriate boundary conditions. With restrictions on the thickness and the lateral dimensions of the slotted plate removed,the equation provides a useful tool for analysing the squeeze-film air damping effect of slotted plates with finite thickness and finite lateral dimensions. For a typical slotted plate structure, the damping force coefficient obtained by this equation agrees well with that generated by ANSYS.