CAJ | 학술논문

根据薄膜光学计算理论和最优化理论,本文提出了一种测量多层薄膜厚度的新的全局优化算法.首先利用遗传的种群性去寻找多个局部极值,然后将较优和较差的种群按一定概率接收并作为模拟退火的初值进行搜索.最后结合共轭梯度算法来提高收敛速度,使整体搜索效率进一步提高.这种遗传退火算法有效地提高了算法的稳定性,减少了算法对膜厚搜索范围的限制.文章最后以3层和4层光擘薄膜为例,利用该算法在10 nm至5 μm的大范围内搜索,所取得的结果,其测量误差小于1%.
근거박막광학계산이론화최우화이론,본문제출료일충측량다층박막후도적신적전국우화산법.수선이용유전적충군성거심조다개국부겁치,연후장교우화교차적충군안일정개솔접수병작위모의퇴화적초치진행수색.최후결합공액제도산법래제고수렴속도,사정체수색효솔진일보제고.저충유전퇴화산법유효지제고료산법적은정성,감소료산법대막후수색범위적한제.문장최후이3층화4층광벽박막위례,이용해산법재10 nm지5 μm적대범위내수색,소취득적결과,기측량오차소우1%.
According to the theories of thin film calculation and optimization, a new global optimization method for multilayer film thickness calculation is presented. Firstly, a new group of local optimums is found out through genetic and mutation operation. Then, the solutions are accepted at a certain probability and will be calculated respectively in Adapted Simulated Annealing (ASA) process as the initial solutions. At last, conjugate gradient algorithm is utilized to search accurately and quickly. This genetic simulated annealing algorithm can effectively enhance the robustness of the algorithm and reduce the limitation of the searching area. The experimental results show that the proposed algorithm can calculate the thickness of 3-layer and 4-layer thin film within the range of 10 nm～5 μm and less than 1% calculation error.