CAJ | 학술논문

辉光放电质谱法(GDMS)作为一种固体直接分析技术,已广泛应用于各种金属、半导体材料的痕量和超痕量杂质分析.充分挖掘仪器的应用潜力,利用固体样品分析表征时所获得的诸多干扰峰信息,结合GDMS仪器的工作机理和特点,分析和甄别样品中的未知常量元素,以获得更全面的样品信息和更可靠的分析结果.
휘광방전질보법(GDMS)작위일충고체직접분석기술,이엄범응용우각충금속、반도체재료적흔량화초흔량잡질분석.충분알굴의기적응용잠력,이용고체양품분석표정시소획득적제다간우봉신식,결합GDMS의기적공작궤리화특점,분석화견별양품중적미지상량원소,이획득경전면적양품신식화경가고적분석결과.
As a direct solid sample technique, glow discharge mass spectrometry (GD-MS) has been widely applied to the trace and ultra-trace element analysis of conductors and micro-conductors. By the usage of various kinds of the interferences in analyzing solid sample, combining with the working principle of GD-MS, we analyzed and recognized matrix in the tested sample messages to obtain more complete sample signals and more reliable analyzing results.