宇航材料工艺
宇航材料工藝
우항재료공예
AEROSPACE MATERIALS & TECHNOLOGY
2009年
6期
45-47
,共3页
离子束辅助沉积%复合薄膜%摩擦磨损
離子束輔助沉積%複閤薄膜%摩抆磨損
리자속보조침적%복합박막%마찰마손
Ion beam assisted deposition%Composite thin films%Friction and wear
采用ZDH-100型号离子束复合沉积设备沉积WS_2-Ti-Ag复合薄膜,基材为轴承钢和单晶硅(100).采用场发射扫描电子显微镜、XRD衍射仪,检测复合薄膜的表面形貌、微观结构.采用球-盘式摩擦磨损试验机,对复合薄膜在大气环境中的摩擦性能进行了研究.结果表明:采用离子束辅助沉积技术制备的WS_2-Ti-Ag复合薄膜是非晶态薄膜;并且随法向载荷的增加,复合薄膜的摩擦因数减小,摩擦状态越稳定,耐磨寿命越短.
採用ZDH-100型號離子束複閤沉積設備沉積WS_2-Ti-Ag複閤薄膜,基材為軸承鋼和單晶硅(100).採用場髮射掃描電子顯微鏡、XRD衍射儀,檢測複閤薄膜的錶麵形貌、微觀結構.採用毬-盤式摩抆磨損試驗機,對複閤薄膜在大氣環境中的摩抆性能進行瞭研究.結果錶明:採用離子束輔助沉積技術製備的WS_2-Ti-Ag複閤薄膜是非晶態薄膜;併且隨法嚮載荷的增加,複閤薄膜的摩抆因數減小,摩抆狀態越穩定,耐磨壽命越短.
채용ZDH-100형호리자속복합침적설비침적WS_2-Ti-Ag복합박막,기재위축승강화단정규(100).채용장발사소묘전자현미경、XRD연사의,검측복합박막적표면형모、미관결구.채용구-반식마찰마손시험궤,대복합박막재대기배경중적마찰성능진행료연구.결과표명:채용리자속보조침적기술제비적WS_2-Ti-Ag복합박막시비정태박막;병차수법향재하적증가,복합박막적마찰인수감소,마찰상태월은정,내마수명월단.
Ion beam assisted deposition equipment (ZDH - 100) was used to prepare WS_2 - Ti - Ag composite films with the substrates of bearing steel and silicon (100). The microstructure ,thickness and morphology of the WS_2 -Ti- Ag composite films were characterized with field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). The friction and wear properties for WS_2 - Ti - Ag multi-layered composite films were investigated by ball-on-disk tribometer in atmospheric environment. Results show that WS_2 - Ti - Ag composite films deposited by ion beam assisted deposition technology are amorphous thin films, and with the normal load increasing, friction coefficient of the films is reduced, friction process becomes more stable and wear life shorter.
