仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2009年
z1期
208-209,211
,共3页
张小水%祁明锋%钟克创%王利利%范子亮%谷永谦
張小水%祁明鋒%鐘剋創%王利利%範子亮%穀永謙
장소수%기명봉%종극창%왕리리%범자량%곡영겸
厚膜半导体工艺%气敏元件生产%精密丝网印刷%激光分割%激光调阻%平面绑定
厚膜半導體工藝%氣敏元件生產%精密絲網印刷%激光分割%激光調阻%平麵綁定
후막반도체공예%기민원건생산%정밀사망인쇄%격광분할%격광조조%평면방정
thick-film semi-conductor technics%gas sensor production%precision screen printing%laser division%laser load adjustment%flat tie-up
文中讲述了将厚膜半导体工艺应用于气敏元件的生产制作,综合运用精密丝网印刷、激光分割、激光调阻、平面绑定等先进技术,达到了高质量、高效率生产气敏元件的效果.应用半导体工艺制作的气敏元件相比传统工艺制作的产品具有体积小、功耗低、机械性能好、批次一致性好等优点.
文中講述瞭將厚膜半導體工藝應用于氣敏元件的生產製作,綜閤運用精密絲網印刷、激光分割、激光調阻、平麵綁定等先進技術,達到瞭高質量、高效率生產氣敏元件的效果.應用半導體工藝製作的氣敏元件相比傳統工藝製作的產品具有體積小、功耗低、機械性能好、批次一緻性好等優點.
문중강술료장후막반도체공예응용우기민원건적생산제작,종합운용정밀사망인쇄、격광분할、격광조조、평면방정등선진기술,체도료고질량、고효솔생산기민원건적효과.응용반도체공예제작적기민원건상비전통공예제작적산품구유체적소、공모저、궤계성능호、비차일치성호등우점.
This article is about production of thick film semi-conductor technics used in gas sensors.Advanced technologies such as precision screen printing,laser division,laser load adjustment,flat tie-up etc are used,thus achieve high quality and efficiency.The gas sensor has advantage of low size and power consumption,good performance and coherence for batch than traditional types.
