中国光学快报(英文版)
中國光學快報(英文版)
중국광학쾌보(영문판)
CHINES JOURNAL OF LASERS B
2004年
11期
654-657
,共4页
李慧玲%曾晓雁%李惠芬%李祥友%陈佚群
李慧玲%曾曉雁%李惠芬%李祥友%陳佚群
리혜령%증효안%리혜분%리상우%진일군
The conventional technology could not fulfill the rapidly growing need for fine conductive lines for its inherent limits. Therefore, in this study laser micro-fine cladding and flexibly direct writing technique is used to obtain conductive lines with high precision and reliability. In the case of different substrates and parameters, film thickness will be different. Film thickness directly influences the reliability and stability of conductive lines with exception of quality and running speed. Therefore, we focus on developing the optimal parameters for the different substrates to achieve expected film thickness and make conductive lines have good performance and quality.