CAJ | 학술논문

提出了一种简单、有效的基于光纤Fabry-Perot干涉的压电陶瓷(PZT)微位移测量的新装置,为提高干涉现象,在Fabry-Perot干涉腔两端面上分别镀不同反射率的薄膜.通过软件编程快速实现对干涉条纹的计数进而确定PZT的微位移,得到的位移电压斜率误差小,实现了对PZT微位移的实时快速测量.测试了同频率不同腔长和同腔长不同频率的压电特性,结果表明变化很小,说明该方法可操作性强,可靠性高.分析了光纤耦合效率和光源的相干性等对实验的影响.
제출료일충간단、유효적기우광섬Fabry-Perot간섭적압전도자(PZT)미위이측량적신장치,위제고간섭현상,재Fabry-Perot간섭강량단면상분별도불동반사솔적박막.통과연건편정쾌속실현대간섭조문적계수진이학정PZT적미위이,득도적위이전압사솔오차소,실현료대PZT미위이적실시쾌속측량.측시료동빈솔불동강장화동강장불동빈솔적압전특성,결과표명변화흔소,설명해방법가조작성강,가고성고.분석료광섬우합효솔화광원적상간성등대실험적영향.
A simple and effective approach,based on fiber optic Fabry-Perot interferometer,was proposed to detect the micro displacement of PZT.In order to promote the phenomenon of interference,both side of Fabry-Perot cavity were coated film with different reflectivity.The PZT micro displacement was acquired by programming software to counting the number of fringes.The obtained slope inaccuracy of displacement to voltage was small, and a rapid and real-time testing of PZT micro displacement was realized.Piezoelectric property was tested under the condition that the driving frequency was fixed and the length of cavity was varied or the length of cavity was fixed and the driving frequency was varied.The result of the experiment,varied a little, indicated the method had a strong operability and high reliability.The influence of the coupling efficiency,sources coherence was analyzed.