CAJ | 학술논문

对于在可变形非磁材料悬臂梁式板单表面粘贴可磁化材料薄膜所构成的磁场微传感器件结构，研究了其处在磁场环境中的磁弹性弯曲变形的磁场-力学特征．为此，建立了由有限元方法分析磁场与有限差分法计算挠曲变形相结合来计算其结构在磁场中产生磁弹性变形的定量分析程序．在此基础上，对于这一微传感结构的算例给出了其结构变形随外加磁场环境变化的磁场-挠度特征关系等定量结果．结果表明：微传感器件不仅可以测量出磁场的大小，而且给出了测量磁场矢量方向的可能性．
대우재가변형비자재료현비량식판단표면점첩가자화재료박막소구성적자장미전감기건결구，연구료기처재자장배경중적자탄성만곡변형적자장-역학특정．위차，건립료유유한원방법분석자장여유한차분법계산뇨곡변형상결합래계산기결구재자장중산생자탄성변형적정량분석정서．재차기출상，대우저일미전감결구적산례급출료기결구변형수외가자장배경변화적자장-뇨도특정관계등정량결과．결과표명：미전감기건불부가이측량출자장적대소，이차급출료측량자장시량방향적가능성．
The purpose of this paper is to study the magneto-mechanical characteristic of a microsensor which is composed of a cantilevered beam plate with ferromagnetic films in order to measure magnetic fields from the deformation of plate when the microsensor is located in the magnetic fields. To this end, a numerical approach combined by the finite element method for magnetic fields and the finite difference method for deflection of the microsensor is proposed to analyze quantitatively the deflection under magnetoelastic interaction. After that, some quantitative results of a case study for the magnetoelastic characteristic between magnetic fields and deflection of the microsensor in the magnetic fields are given in details. The results show that this microsensor is not only used to measure the magnitude of magnetic intensity, but also applied possibly to monitor the direction of vector of the magnetic field.