CAJ | 학술논문

以外框驱动内框检测(ISOD)的框架式振动陀螺为对象,采用CSMC 0.6μm标准CMOS工艺给出了驱动电路和检测电路的实现方式.仿真结果显示,同外加驱动方式相比,自激驱动方式能够让驱动电压工作于微机械陀螺的驱动谐振频率上,对温漂和时漂有很强的抑制作用,能够实现最大的检测分辨率,微机械陀螺性能显著提高.采用全差动工作方式相对于单端工作方式,可以有效的提高信噪比(SNR),并可以抑制共模噪声的干扰,并降低对高频载波的依赖度.在大气环境下,微机械陀螺的响应度为10 mV/deg,灵敏度为0.1°/S*Hz2.
이외광구동내광검측(ISOD)적광가식진동타라위대상,채용CSMC 0.6μm표준CMOS공예급출료구동전로화검측전로적실현방식.방진결과현시,동외가구동방식상비,자격구동방식능구양구동전압공작우미궤계타라적구동해진빈솔상,대온표화시표유흔강적억제작용,능구실현최대적검측분변솔,미궤계타라성능현저제고.채용전차동공작방식상대우단단공작방식,가이유효적제고신조비(SNR),병가이억제공모조성적간우,병강저대고빈재파적의뢰도.재대기배경하,미궤계타라적향응도위10 mV/deg,령민도위0.1°/S*Hz2.
Based on the object of Outside Drive Inside Sense frame vibration micro-machined gyroscope, given the circuits realization with CSMC 0.6 μm standard CMOS technology. The simulation result revealed that the self-excitation driving model can make drive AC voltage work at the resonance of sensor, have strongly restrain ability to temperature drift and time drift. The work mode of full difference can improve SNR dramatic evidently, and restrain the disturb of common mode noise, and have less sensitivity to carrier wave. At one atom environment, the sensor have responsibility 10 mV/deg, sensitivity 0.1°/S*Hz2.