CAJ | 학술논문

本文介绍了使用宽光谱监控系统镀制增透膜的基本原理和技术特点.给出了针对不同的膜层特性计算评价函数的方法,分别为能量法和特征点法,能量法适合膜层的光学特性对每一个波长点的权重要求都是一样的,特征点法适合于只对膜层光学特性的某几个特定波长的要求较高,并根据膜料光学参数的特性,分别设置权重因子,其它波长忽略不计.用工艺曲线代替理论设计曲线作为目标曲线,解决实际镀制的光谱特性与理论值存在偏差的问题,使评价函数的极小值趋近于零,达到最佳膜厚.这种简单而准确的方法对于提高宽带增透膜镀制精度和成品率有显著的效果,具有实际的应用价值.
본문개소료사용관광보감공계통도제증투막적기본원리화기술특점.급출료침대불동적막층특성계산평개함수적방법,분별위능량법화특정점법,능량법괄합막층적광학특성대매일개파장점적권중요구도시일양적,특정점법괄합우지대막층광학특성적모궤개특정파장적요구교고,병근거막료광학삼수적특성,분별설치권중인자,기타파장홀략불계.용공예곡선대체이론설계곡선작위목표곡선,해결실제도제적광보특성여이론치존재편차적문제,사평개함수적겁소치추근우령,체도최가막후.저충간단이준학적방법대우제고관대증투막도제정도화성품솔유현저적효과,구유실제적응용개치.
A novel technique has been successfully developed to improve the evaluation of the merit function of the high precision anti-reflectance(AR)optical films with different layer characteristics,coated under broadband monitoring and controlling on glass substrates.The technique involves two modes:the energy mode assumes that all wavelengths have identical weight in the merit function;and the characteristic wavelength mode narrows sunlight to only a few key wavelengths with specific weights.In the technique,the curve of the theoretical reflectance is replaced with optimized measurements for a specific film growth system as the objective curve in such a way that the merit function approaches zero.As a result,high precision automatic control can be realized easily for individual layer thickness of the multi-layers.The technique works well on industrial scale with some advantages,including fewer layers,shorter evaporation time and particularly suitable for non-standardized film system.