CAJ | 학술논문

采用溶胶-凝胶法在玻璃基底上制备掺杂铝的氧化锌薄膜.研究了不同的铝掺杂浓度、薄膜厚度以及退火温度对电阻率的影响,结果表明掺杂铝摩尔分数为2%、退火温度在550℃时电阻率最低,电阻率随着薄膜厚度的增加而减小.通过XRD和SEM对薄膜的组织结构和形貌进行了表征,结果表明样品表面相对平整、致密,AZO薄膜保持着ZnO六角纤锌矿结构,说明了Al原子对Zn原子的有效替位.
채용용효-응효법재파리기저상제비참잡려적양화자박막.연구료불동적려참잡농도、박막후도이급퇴화온도대전조솔적영향,결과표명참잡려마이분수위2%、퇴화온도재550℃시전조솔최저,전조솔수착박막후도적증가이감소.통과XRD화SEM대박막적조직결구화형모진행료표정,결과표명양품표면상대평정、치밀,AZO박막보지착ZnO륙각섬자광결구,설명료Al원자대Zn원자적유효체위.
Al-doped ZnO thin films are prepared on glass substrates by sol-gel method,the effect of different Al content,film thickness and annealing temperature on resistivity are discussed,the resistivity decreased with increase of thickness.The results indicate that a minimum resistivity for the film is obtained doping with 2% Al,and annealing at 550℃.The thin films are characterized by scanning electron microscopy and X-ray diffraction.The results prove that the samples are smooth and compact,the AZO thin films has the same crystalline phase as hexagonal wurtzite,that means Al3+displaces Zn2+ effectively.