真空科学与技术学报
真空科學與技術學報
진공과학여기술학보
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY
2009年
4期
403-410
,共8页
微机电系统%真空%热控%变发射率%百页窗
微機電繫統%真空%熱控%變髮射率%百頁窗
미궤전계통%진공%열공%변발사솔%백혈창
MEMS%Vacuum%Thermal control%Variable emissivity%Shutter
变发射率热控技术是空间环境下的重要热控手段.微小卫星质量轻,尺寸小,功耗低及其真空环境工作等特点对热控系统提出了新的要求,相应热控器件应具有小质量、大发射率调节比、关闭状态漏热小、响应快等特点.MEMS技术由于其设计灵活性高、功耗低及器件体积、重量方面的优势,可很好地满足这类器件的要求.本文重点对基于MEMS技术的微百页窗,微热开关,微静电换热器等技术的研究进展、关键技术与适用范围进行了归纳总结,将基于MEMS技术的变发射率器件和基于材料研究的电致变色和热致变色这两种技术进行了对比分析,指出了MEMS技术在微小卫星变发射率热制器件中的发展趋势和潜力.
變髮射率熱控技術是空間環境下的重要熱控手段.微小衛星質量輕,呎吋小,功耗低及其真空環境工作等特點對熱控繫統提齣瞭新的要求,相應熱控器件應具有小質量、大髮射率調節比、關閉狀態漏熱小、響應快等特點.MEMS技術由于其設計靈活性高、功耗低及器件體積、重量方麵的優勢,可很好地滿足這類器件的要求.本文重點對基于MEMS技術的微百頁窗,微熱開關,微靜電換熱器等技術的研究進展、關鍵技術與適用範圍進行瞭歸納總結,將基于MEMS技術的變髮射率器件和基于材料研究的電緻變色和熱緻變色這兩種技術進行瞭對比分析,指齣瞭MEMS技術在微小衛星變髮射率熱製器件中的髮展趨勢和潛力.
변발사솔열공기술시공간배경하적중요열공수단.미소위성질량경,척촌소,공모저급기진공배경공작등특점대열공계통제출료신적요구,상응열공기건응구유소질량、대발사솔조절비、관폐상태루열소、향응쾌등특점.MEMS기술유우기설계령활성고、공모저급기건체적、중량방면적우세,가흔호지만족저류기건적요구.본문중점대기우MEMS기술적미백혈창,미열개관,미정전환열기등기술적연구진전、관건기술여괄용범위진행료귀납총결,장기우MEMS기술적변발사솔기건화기우재료연구적전치변색화열치변색저량충기술진행료대비분석,지출료MEMS기술재미소위성변발사솔열제기건중적발전추세화잠력.
The latest progresses in design,fabrication and applications of the variable emissivity thermal control,microelectro-mechanical system(MEMS)devices used in space environment,are tentatively reviewed.The advantages of the variable emissivity thermal control and MEMS in fabrication of micro-satellites are discussed.Discussions are focused on key design and applications of the MEMS-based micro-shutters,micro-thermal switches and micro-electric static radiators.The advantages of the MEMS thermal control technology based on new material,electrochromic and thermochromic technology were studied.The trend and the potentials of MEMS technology in fabricating the variable emissivity thermal controllers used in micro-satellite are also summarized in a thought provoking way.