CAJ | 학술논문

二氧化铈具有高折射率、介电常数和紫外吸收率,因此它广泛地应用于各种光学和电子器件.本文采用射频磁控溅射法在玻璃基片上沉积CeO2薄膜.溅射过程中,首先制备纯二氧化铈靶材,然后在不同的功率上调节不同的基片温度进行溅射.采用光电子能谱、X射线衍射、拉曼光谱和扫描电镜等测试方法表征薄膜的特性.
이양화시구유고절사솔、개전상수화자외흡수솔,인차타엄범지응용우각충광학화전자기건.본문채용사빈자공천사법재파리기편상침적CeO2박막.천사과정중,수선제비순이양화시파재,연후재불동적공솔상조절불동적기편온도진행천사.채용광전자능보、X사선연사、랍만광보화소묘전경등측시방법표정박막적특성.
Cerium dioxide has high refractive index and dielectric constant and ultraviolet absorption which may be useful for various optical and electronic applications. Cerium dioxide thin films were deposited on glass substrates using R. F. magnetron sputtering. A cerium dioxide target was used for sputtering and films were deposited at various substrate temperature under different sputtering power. The CeO2 thin films were characterized by X-ray photoelectron spectroscopy and spectrometer, X-ray diffraction, Raman spectroscopy and scanning electron microscopy.