真空
真空
진공
VACUUM
2001年
2期
36-38
,共3页
胡去慧%李京增%余圣发%彭晶%苏丹丹%彭传才%李伟%蒋力%刘婧
鬍去慧%李京增%餘聖髮%彭晶%囌丹丹%彭傳纔%李偉%蔣力%劉婧
호거혜%리경증%여골발%팽정%소단단%팽전재%리위%장력%류청
高透明%低方阻%ITO-Ag-ITO柔性薄膜%连续卷绕镀膜
高透明%低方阻%ITO-Ag-ITO柔性薄膜%連續捲繞鍍膜
고투명%저방조%ITO-Ag-ITO유성박막%련속권요도막
高透明低方阻ITO-Ag-ITO柔性薄膜具有广泛的用途。本文介绍了膜系设计、工艺参数及控制。对设备结构也做了简要叙述。测试结果表明，ITO-Ag-ITO多层膜采用连续卷绕镀的方法生产，性能优异，工艺稳定，系统可靠。
高透明低方阻ITO-Ag-ITO柔性薄膜具有廣汎的用途。本文介紹瞭膜繫設計、工藝參數及控製。對設備結構也做瞭簡要敘述。測試結果錶明，ITO-Ag-ITO多層膜採用連續捲繞鍍的方法生產，性能優異，工藝穩定，繫統可靠。
고투명저방조ITO-Ag-ITO유성박막구유엄범적용도。본문개소료막계설계、공예삼수급공제。대설비결구야주료간요서술。측시결과표명，ITO-Ag-ITO다층막채용련속권요도적방법생산，성능우이，공예은정，계통가고。
The flexible thin films of high transparent and low square resistance are widely used. Film construction and control of process parameters are introduced and device of making films is also introduced. Measurement result indicates that the optical and electrical properties of ITO-Ag-ITO multi-layer films are excellent, process is very stable by rolling coating, operation system is dependable.
