仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2009年
z1期
171-174
,共4页
薄膜压力传感器薄膜沉积%灵敏度温度自补偿%薄膜激光修调%液氢
薄膜壓力傳感器薄膜沉積%靈敏度溫度自補償%薄膜激光脩調%液氫
박막압력전감기박막침적%령민도온도자보상%박막격광수조%액경
thin film deposition thin film pressure sensor%thin films laser repaired%liquid hydrogen
超低温薄膜压力传感器可用于液氢、液氮、液氧等低温环境的压力测量,目前国内外超低温压力传感器产品的工作温度最低为-200 ℃.文中主要介绍了对超低温薄膜压力传感器的研究,通过薄膜压力传感器设计和工艺技术研究,成功研制出超低温薄膜压力传感器,并在-253(液氢)～+60 ℃温度环境下进行压力传感器静态性能测试,结果表明传感器性能指标优异,实现了超低温薄膜压力传感器技术突破.
超低溫薄膜壓力傳感器可用于液氫、液氮、液氧等低溫環境的壓力測量,目前國內外超低溫壓力傳感器產品的工作溫度最低為-200 ℃.文中主要介紹瞭對超低溫薄膜壓力傳感器的研究,通過薄膜壓力傳感器設計和工藝技術研究,成功研製齣超低溫薄膜壓力傳感器,併在-253(液氫)～+60 ℃溫度環境下進行壓力傳感器靜態性能測試,結果錶明傳感器性能指標優異,實現瞭超低溫薄膜壓力傳感器技術突破.
초저온박막압력전감기가용우액경、액담、액양등저온배경적압력측량,목전국내외초저온압력전감기산품적공작온도최저위-200 ℃.문중주요개소료대초저온박막압력전감기적연구,통과박막압력전감기설계화공예기술연구,성공연제출초저온박막압력전감기,병재-253(액경)～+60 ℃온도배경하진행압력전감기정태성능측시,결과표명전감기성능지표우이,실현료초저온박막압력전감기기술돌파.
Ultra low temperature thin film pressure sensor can be used on low temperature environment pressure measure of liquid hydrogen,liquid nitrogen,liquid oxygen and so on.The product's lowest working temperature is -200 ℃ until now.This article mainly introduce research of ultra low temperature thin film pressure sensor.Through research of thin film pressure sensor designs and techniques research,ultra low temperature thin film pressure sensor was prepared successfully,and the sensor's static performance was tested in -253～+60 ℃ environment.The result indicated that the index of the sensor was well,the techniques of ultra low temperature thin film pressure sensor was archived.
