CAJ | 학술논문

通过普通的紫外(UV)光刻工艺,结合"变倾角缩口"新技术,研制了不同发射单元尺寸的碳纳米管(CNTs)阵列阴极.扫瞄电镜分析表明,随着缩口尺寸的依次减小(从0.6μm到0.4μm,最后到0.2μm),发射单元内CNTs的根数也不断减少.当孔径缩至0.2μm时,发射单元仅由1根～3根CNTs组成,并且大部分单元顶端均有单根CNT伸出,使得整个发射体近似于单根CNT.场发射特性测试结果表明,0.2μm发射单元尺寸的阵列阴极,开启电场约2V·μm~(-1);当场强为20V·μm~(-1)时,该阵列的电流密度达到0.35A·cm~(-2),比1μm尺寸的阵列阴极提高了近4倍,比连续生长的薄膜CNTs阴极则高1～2个数量级.
통과보통적자외(UV)광각공예,결합"변경각축구"신기술,연제료불동발사단원척촌적탄납미관(CNTs)진렬음겁.소묘전경분석표명,수착축구척촌적의차감소(종0.6μm도0.4μm,최후도0.2μm),발사단원내CNTs적근수야불단감소.당공경축지0.2μm시,발사단원부유1근～3근CNTs조성,병차대부분단원정단균유단근CNT신출,사득정개발사체근사우단근CNT.장발사특성측시결과표명,0.2μm발사단원척촌적진렬음겁,개계전장약2V·μm~(-1);당장강위20V·μm~(-1)시,해진렬적전류밀도체도0.35A·cm~(-2),비1μm척촌적진렬음겁제고료근4배,비련속생장적박막CNTs음겁칙고1～2개수량급.
Four types of arrays of single carbon nanotubes (CNTs),with field emitter diameters of 1μm,0.6μm,0.4μm and 0.2μm,were fabricated,respectively,by combining conventional ultraviolet (UV) lithography and the recently-developed technique of "aperture reduction via varying glancing angle".The scanning electron microscopy images show that the number of CNTs in each emitter decreases with an reduction of the aperture size.For the arrays fabricated with the 0.2μm aperture,only 1～3CNTs were observed in each unit cell,while most emitters exhibit single ones,in addition,its onset field lowers to 2V·μm~(-1);and at a field of 20V·μm~(-1),its emission current density reaches 0.35A·cm~(-2),4 times higher than that of the 1.0μm CNTs emitter array and 1 to 2 order of magnitudes higher than that of the densely packed CNTs films.